BULLETIN of the

POLISH ACADEMY of SCIENCES

TECHNICAL SCIENCES

BULLETIN of the POLISH ACADEMY of SCIENCES: TECHNICAL SCIENCES
Volume 53, Issue 4, December 2005

Micro and Nano -scale mechanics

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Aims&Scope, Subscription Editors Authors' guide Vol 53-4 mirror: http://fluid.ippt.gov.pl/~bulletin/

  
pp 373 - 384
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On the static and dynamic response of electrostatic actuators

D. Elata
A systematic approach for analyzing the static and dynamic electromechanical response of electrostatic actuators is presented. The analysis is based on energy methods. An analysis approach for extracting dynamic response parameters of electrostatic actuators, while only considering static states of the system, is presented. This is an efficient method for extracting the dynamic pull-in parameters because it does not require time integration of momentum equations.
 
Keywords:

electrostatic actuators, pull-in instability

 
 
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12 January 2006, site prepared  by KZ