POLISH ACADEMY of SCIENCES
TECHNICAL SCIENCES
Material Sciences and Engineering
| BULLETIN
of the
POLISH ACADEMY of SCIENCES TECHNICAL SCIENCES |
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| Volume
54, Issue 2, June 2006
Material Sciences and Engineering |
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| Issue Index | Authors Index | Scope Index | Web Info | |
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| Aims&Scope, Subscription | Editors | Authors' guide | to read PDF files | mirror: http://fluid.ippt.gov.pl/~bulletin/ |
| pp 221 - 231 |
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| Technology and applications of Low Temperature Cofired Ceramic (LTCC) based sensors and microsystems |
| L.J. GOLONKA |
| The paper presents general information on LTCC materials, manufacturing processes and properties of fired modules. A Multichip Module package has been the main application of Low Temperature Cofired Ceramic (LTCC) technology. Recently, this technology is also used for production of sensors, actuators and microsystems. The research and development on the LTCC sensors and microsystems carried out in the Laboratory of Thick Film Microsystems at Wroclaw University of Technology are presented. LTCC microfluidic system is described in detail. Moreover, a short information is given on other LTCC applications . |
| Keywords: |
| thick film, LTCC, sensor, microsystem, microfluidic |
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| Issue Index | Authors Index | Scope Index | Web Info |
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| Aims&Scope, Subscription | Editors | Authors' guide | to read PDF files |
| Copyright
® Bulletin of the Polish Academy of Sciences: Technical Sciences
13 June 2006, site prepared by KZ |
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